正翻译步骤 5
步骤 5

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Shown in these photos is the ST LYPR540AH Tri-axis MEMS gyroscope, shot by a scanning electron microscope (SEM).
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MEMS devices require extremely complicated and sensitive manufacturing procedures to produce the kind of accuracy needed for reliable sensors.
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Most MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the deposited film to remain after etching, and etching to remove excess film to achieve the final product.